Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches
January 01, 2020
Microelectronics Reliability - Volume 104, Pages 113544
Design, closed-form modeling and analysis of SU-8 based electrothermal microgripper for biomedical applications
April 04, 2019
Microsystem Technologies - Volume 25, pages 1171–1184