College of Electrical & Mechanical Engineering
Department: Micro and Nano Robotics Tech Lab Micro and Nano Robotics Tech Lab

Micro and Nano Robotics Tech Lab

MEMS Design, Analysis, and Testing Facilities

Our lab is equipped with state-of-the-art facilities for the design, analysis, and testing of MEMS devices. We utilize advanced software tools and high-precision instruments to ensure the highest standards of research and development in MEMS technology.

MEMS+ Software: MEMS+ provides a powerful platform for designing and simulating MEMS devices. It integrates with popular electronic design automation (EDA) tools, allowing seamless co-simulation of MEMS devices with electronic circuits. MEMS+ offers a comprehensive suite of features including parametric modeling, multi-physics simulation, and system-level analysis.

CoventorWare: CoventorWare is a leading software for MEMS design and analysis. It offers robust tools for creating detailed 3D models of MEMS structures, performing finite element analysis (FEA), and simulating various physical effects such as mechanical stress, thermal behavior, and fluid dynamics. CoventorWare enables precise optimization and validation of MEMS designs.

MATLAB: MATLAB is extensively used in our lab for data analysis, algorithm development, and numerical simulation. Its powerful computational capabilities and extensive toolboxes support a wide range of MEMS research activities, from signal processing to control system design.

For the testing and characterization of MEMS devices, we have the following equipment:

Probe Station:  Everbeing International probe station (C6), featuring 2x, 10x, and 20x zoom capabilities, allows for precise electrical probing and detailed analysis of MEMS devices. The probe station is designed to provide stable and accurate contact with the microelectromechanical structures, facilitating the measurement of electrical characteristics. This high-resolution system is essential for examining the performance and reliability of MEMS and Photonics devices under various conditions.

Optical Microscope: The high-resolution optical microscope enables detailed inspection and analysis of MEMS structures, ensuring quality control and identification of micro-scale features.

Dynamic Signal Analyzer: The Agilent 35670A is essential for characterizing the dynamic performance of MEMS devices, providing insights into their vibrational behavior, resonant frequencies, and overall stability under different operating conditions. The DSA can measure FFT, Harmonic Response, Transient Response, Time Domain Response, Nyquist plot, etc. of the device under test.

Data Acquisition Cards: We employ a variety of data acquisition cards to facilitate efficient data collection and analysis, supporting a wide range of testing protocols and experimental setups, including:

  • SCB-68A: Provides flexible connectivity and precise signal conditioning for data acquisition systems.
  • MyRIO-1900: A reconfigurable I/O device from National Instruments that integrates with LabVIEW for real-time data acquisition and control.
  • AD7746: Specifically used for high-resolution capacitance evaluation, essential for MEMS capacitance measurement.
  • Raspberry Pi 4: A versatile, low-cost platform for custom data acquisition and control applications.
  • PIC Microcontrollers: Utilized for embedded control and data acquisition tasks in various MEMS applications.
  • Arduino Boards: Widely used for prototyping and developing custom data acquisition and control systems.

These tools and equipment enable precise design, simulation, and testing, ensuring high performance and reliability of our MEMS devices.

  • Other Testing Equipment:

Power Supplies:

  • DP832 (Rigol): A programmable power supply with multiple output channels, offering high accuracy and stability.
  • TN305D (TITAN): A robust power supply providing reliable power for various experimental setups.

Digital Multimeters:

  • 3136 (Escort): A high-precision digital multimeter for accurate voltage, current, and resistance measurements.
  • UT801 (UniT): A versatile multimeter with a wide range of measurement functions.

Oscilloscopes:

  • MPO6084D (Hantek): A high-performance oscilloscope with multiple channels and deep memory.
  • DSO5202P (Hantek): A digital storage oscilloscope suitable for capturing and analyzing complex signals.
  • XDS3202E (Owon): An advanced oscilloscope with high bandwidth and real-time sampling capabilities.

Function Generator:

  • UTG9005C (Uni-T): A versatile function generator for creating various waveforms and signal patterns.

Digital Force Gauges: We have a range of digital force gauges capable of measuring forces from 300 mN to 50 N

Synthesis, Characterization, and Testing of Piezoelectric Material-Based Sensors

Our lab also specializes in the synthesis, characterization, and testing of piezoelectric material-based sensors. Equipped with advanced synthesis techniques and characterization tools, we focus on developing innovative piezoelectric sensors for various applications. Our facilities include:

LCR Meter (Matrix-MCR-6200A): Used for accurate measurement of inductance (L), capacitance (C), and resistance (R), essential for characterizing piezoelectric materials and components.

High-Temperature Fryer (6L TRS): This fryer uses silicon oil as a heating medium, providing uniform and controlled heating essential for processing piezoelectric materials. Silicon oil ensures consistent temperature control and prevents contamination, which is crucial for maintaining the quality and performance of the piezoelectric materials.

Horizontal Rolling Ball Mill: Employed for sample powder grinding, this horizontal rolling ball mill is crucial for the preparation of piezoelectric material powders. It ensures uniform size reduction and dispersion of powder particles, which is essential for achieving consistent material properties.

Heat Press Machine (CR1704): This machine is used for applying heat and pressure to bond piezoelectric materials or to fabricate composite structures.

Vacuum Drying Oven (DZF-6010-Henan Laphan Industry Co., Ltd): Essential for removing moisture from piezoelectric materials and ensuring their stability and performance under varying environmental conditions.

DC HV Power Supply (IPS-ATDP10000-0.12): Provides adjustable high voltage for testing the electrical characteristics and performance of piezoelectric sensors. This high voltage power supply is critical for the poling process of piezoelectric materials. Poling involves applying a strong electric field to align the dipoles within the material, thereby enhancing its piezoelectric properties. The adjustable voltage capability allows precise control over the poling process to achieve optimal material performance

These capabilities allow us to push the boundaries of piezoelectric sensor technology, contributing to advancements in various fields including biomedical applications.

Supervisor:

Dr. Hamid Jabbar
[email protected]

Members:

Dr. Muhammad Mubasher Saleem
[email protected]
Dr. Mohsin Islam Tiwana
[email protected]
Dr. Muhammad Osama Ali
[email protected]
Dr. Hassan Elahi
[email protected]
Dr. Danish Hussain
[email protected]

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